Research of Tribology and Properties of TiSiN by Cathode Current

• Main Authors: De-Jung Chen, 陳得容
• Other Authors: 陳適範
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/h2s29p

碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 98 === he cathode arc depositions of TiSiN coatings for tool application are investigated. A filtered cathode arc deposition system is employed to deposite TiSiN in N2 reacting atmosphere using a Ti-Si alloy as the arc source. The effects of cathode current on the tribological properties of TiSiN films are investigated. Their microstructures, surface morphology, scratch and wear properties are also characterized. With the increase of cathode current, the Si concentration in TiSiN increases. The microhardness and coating thickness also increases with increasing cathode. It is found that the tribological properties of coated tools are advantageous over the uncoated tools. The best tribological properties are obtained by TiSiN coatings deposited using 110A current, 45V bias with a 30 sccm flow rate of N2 gas.