Research of Tribology and Properties of TiSiN by Cathode Current

碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 98 === he cathode arc depositions of TiSiN coatings for tool application are investigated. A filtered cathode arc deposition system is employed to deposite TiSiN in N2 reacting atmosphere using a Ti-Si alloy as the arc source. The effects of cathode current on the...

Full description

Bibliographic Details
Main Authors: De-Jung Chen, 陳得容
Other Authors: 陳適範
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/h2s29p

Similar Items