Development of counting device to combine micro-fluidic channel chip with CMOS-MEMS chip
碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === This study mainly used CMOS-MEMS process technology and Micro-Electro-Mechanical Systems (MEMS) technology to produce particle counters. This study divided into three parts, namely (1) CMOS-MEMS counting chip: CMOS-MEMS counting chips were manufactured by TSMC...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ksngsy |