| Summary: | 碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === This study mainly used CMOS-MEMS process technology and Micro-Electro-Mechanical Systems (MEMS) technology to produce particle counters. This study divided into three parts, namely (1) CMOS-MEMS counting chip: CMOS-MEMS counting chips were manufactured by TSMC 0.35 μm 2P4M processes, which integrated the counting structure with amplifying circuit. And the counting structure was made the counting hole by Inductive Coupled Plasma (ICP) in the post-process. (2) Micro-fluidic channel chip: Utilizing the glass as the substrate, and produced the under electrodes and Micro-fluidic channel which matched with the CMOS-MEMS counting chip. (3) CMOS-MEMS counting chip and Micro-fluidic channel chip combination: Utilizing electro-less plating method to make the metal bumps above the counting chip as the connection between CMOS-MEMS counting chip and Micro-fluidic channel chip, and finally using the poly-dimethylsiloxane (PDMS) to seal them.
Fundamentally, this counting device is based on coulter principle, when particles passed through the counting structure, the steady electric current will decreased. Counting the number of decreased current will get the number of particles. First, we designed the electrode structure, and used the simulation software called CFD-RC to simulate the electric field and the particles’ movement. According to the result of simulation and the principle of counting, we produced the counting device.
Successfully, this study has proven the feasibility of counting particles by using the CMOS-MEMS counting chip, and measured the current signal of structure by amplifying circuit in liquid.
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