Using CMOS-MEMS Process Design and Production of Capacitive Directional Microphone
碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === CMOS-MEMS process is directly from the general IC manufacturing in the CMOS process with micro-processing technology, it has the mechanical properties, thus using CMOS-MEMS process to fabricate MEMS components, not only has a general MEMS processing technology...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/b5ta2q |