Fabrication of Nanoporous Gas Sensors Using Anodic Aluminum Oxidation Process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === An integrated technology that anodic aluminum oxide (AAO) method and micro- electromechanical systems (MEMS) were proposed. And tin dioxide (SnO2) was used as gas-sensitive material of the nanoporous gas sensors. Firstly, it made use of AAO to manufacture nanop...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f69n5q |