Fabrication of ZnO (002) thin films grown by PECVD
碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === The wurtzite ZnO thin films with c-axis (0002) preferred orientation have been successfully grown on the Si(100) and glass substrates by plasma enhanced chemical vapor deposition (PECVD) using diethylzinc (DEZn) liquid and carbon dioxide (CO2) gas as the Zn and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f99fs4 |