Effects of Different Return Air System Designs on Airflow Characteristics and Temperature Distributions in a Cleanroom
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 98 === A non-unidirectional airflow cleanroom is one of the most common systems applied in semiconductor industries to control the concentration of airborne particles and the relevant temperature and relative humidity ranges; however, the controlled manufacturin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/c6t2ej |