Study of thin films using high resolution X-ray diffraction
碩士 === 淡江大學 === 物理學系碩士班 === 98 === This dissertation presents the study of the surface and interface structures of thin films by means of x-ray reflectivity (XRR) and high resolution x-ray diffraction (HRXRD). One of the systems studied is the AlGaN/GaN multi-layers, which is used for the high elect...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/85045677753873257243 |