Deposition of Al2O3 thin film on ZnO/Glass by e-beam evaporation to improve properties of the surface acoustic wave devices
碩士 === 大同大學 === 光電工程研究所 === 98 === Now communication elements are developing towards high frequency. Surface acoustic wave (SAW) devices required velocity, high electromechanical coupling coefficient and low insertion loss. SAW devices composed of the piezoelectric thin film and different substrate...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51515007715661419848 |