Characteristics of the Transparent Conductive Thin Film by RF Magnetron Sputtering
碩士 === 大同大學 === 光電工程研究所 === 98 === Transparent conducting oxide films possess excellent electrical and optical properties. They can be widely applied to the optoelectronic industry. In this study, the ITO (indium tin oxide) and the AZO (aluminum zinc oxide) were deposited on glass substrates by RF m...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74918739012873060687 |