Nanofabrication of Fresnel Zone Plates for Transmission X-ray Microscopy by Electron Beam Lithography and Electrodeposition
博士 === 大同大學 === 材料工程學系(所) === 98 === In the research of x-ray microscopy, the fabrication of Fresnel zone plates (FZPs) with high resolution is one of the most difficult and important challenges for focusing hard x-rays. In our study, we utilized e-beam lithography (EBL) and electrodeposition to fab...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67852831090077528554 |