Effects of intermediate plasma treatment and hydrogen content on mechanical properties and wear behavior of diamond-like carbon films
碩士 === 大同大學 === 材料工程學系(所) === 98 === Diamond-like carbon (DLC) films were deposited on silicon substrate using a methane/hydrogen gas mixture by RF plasma enhanced chemical vapor deposition (RF-PECVD). The effects of deposition time, intermediate plasma treatment time, plasma post-treatment time and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05492540058830829453 |