The Physical Properties and Biocompatibility of Diamond Like Carbon Film on Different Roughness Silicon Substrate
碩士 === 大同大學 === 機械工程學系(所) === 98 === Residual stress is often observed during a thin film deposition process. The stress not only influences the work life of the component but it also affects the microstructure and mechanical properties. This thesis investigates how the internal stress affects the m...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14036115492897732105 |