Combination of Priciple Component Analysis and Clusterwise Regression for Modeling Wafer Acceptance Test Data
碩士 === 元智大學 === 工業工程與管理學系 === 98 === In semiconductor manufacturing, the conduction of regression models on Wafer Acceptance Test (WAT) data plays a cornerstone to Fab-wide Process Control. Unfortunately, WAT data usually manifests multiple liner models, in which the model Indicator is usually a “h...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27655370154865746550 |