A study of lithography processing for improving TFT-LCD patterns uniformity
碩士 === 元智大學 === 電機工程學系 === 98 === At present, the faster the development of manufacturing equipment, the larger the size of glass substrate of TFT LCD due to the consideration of the product cost. This leads the control of uniformity of TFT LCD patterns formed by lithography to be more difficult tha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69559682817857264556 |