Preparation and Applications of RF-Sputtered Transparent Conductive Thin Films of Aluminum-doped Magnesium Zinc Oxide
碩士 === 長庚大學 === 化工與材料工程學系 === 99 === The objectives of this research are to preare the ceramic targets of aluminum-doped magnesium zinc oxid (AMZO) by solid-state reactions and the thin films of AMZO by RF magnetron sputtering. In addition, the effects of the amount of alumina and magnesium dopant i...
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| Format: | Others |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95050505582488352997 |