電鍍銅金屬薄膜與檢測分析之研究
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 99 === The materials with low electronic constant receive more and more attention because of the fast development of the VLASI process. Electrodeposition was adopted to resolve the disadvantages, cost high, unstable and inevitable doping for CVD. The electroposi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06189217028815779803 |