The Application of Neural Fuzzy Network in Temperature Control of Heater Block of ICP Etcher
碩士 === 中原大學 === 電機工程研究所 === 99 === In the semiconductor manufacturing process of etching, temperature control is a very important factor. The stability of the etching rate and quality of uniformity are related to accuracy of temperature control. In situation that there are some defects of deigni...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03958479419702582091 |