Application of Laser Spot Technology an Inspection System of Solar Wafer Surface
碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 99 === In this study an optical inspection system for the saw mark and surface roughness of solar wafer with laser spot technique is presented. This system has the advantages high speed, non-contact detection, and accurate rate. The laser light incident on the substr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68310583671609414253 |