Microfluidics Fabrication Using Deep Reactive Ion Etching Technology
碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 99 === Based on semiconductor and deep reactive ion etching techniques, the microfulidic fabrication is studied. To fabricate PMMA microfluidic disc, The reaction process parameters are discussed for studying Polymethyl methacrylate（PMMA）etching effects, such as RF p...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21029943836663976779 |