Microfluidics Fabrication Using Deep Reactive Ion Etching Technology

碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 99 === Based on semiconductor and deep reactive ion etching techniques, the microfulidic fabrication is studied. To fabricate PMMA microfluidic disc, The reaction process parameters are discussed for studying Polymethyl methacrylate(PMMA)etching effects, such as RF p...

Full description

Bibliographic Details
Main Authors: Yuan-Chi Teng, 鄧元吉
Other Authors: Hsing-Cheng Chang
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/21029943836663976779