High Transmittance Laser Mirror Fabricated by Ion Beam Sputtering for Deep UV at 266 nm
碩士 === 輔仁大學 === 物理學系 === 99 === It is essential to all deep UV optical materials having wide bandgap so that they are transparent to the DUV light. However, low packing density, columnar structure, and water adsorption were found in MgF2 and Al2O3 thin films deposited by conventional thermal evapora...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/35356096034629035471 |