Development and Application of an Atomic Force Microscope Probe Control System
博士 === 華梵大學 === 機電工程學系博碩專班 === 99 === Atomic Force Microscope (AFM) can achieve the nanometer scale level of image acquisitions with the aid of piezoceramic actuators. However, the tracking control accuracy of piezoceramic actuators is limited due to their inherent hysteresis effect, creep effec...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61607087592855076501 |