The Growth Study of Enhanced Conductivity on Al-doped ZnO Thin Films
碩士 === 義守大學 === 電子工程學系碩士班 === 99 === In this thesis, the growth of the aluminum-doped Zinc oxide (AZO) films had been studied. The AZO thin films was deposited on the glass substrate with different parameter at room temperature by the radio frequency (RF) magnetron sputtering. The microstructures, o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92774006431673142466 |