Electrostatic contact coupling analysis of microelectromechanical systems
碩士 === 義守大學 === 電機工程學系碩士班 === 99 === Electrostatic contact coupling analysis is important for the microelectromechanical systems (MEMS) design. This thesis constructed two kinds of micro-electromechanical system model: single-ended fixed and double-ended. The structure as electrostatic actuator, is...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04487175343058637370 |