Applying Post-treatment to Improve the Electrical and Optical Properties of In-line Sputtered Gallium and Aluminum Co-doped Zinc Oxide Films
碩士 === 崑山科技大學 === 電機工程研究所 === 99 === In-line sputtered aluminum and gallium co-doped zinc oxide (GAZO) films were following treated either by vacuum annealing or hydrogen plasma annealing. The electrical, optical and microstructure properties of the post-processed films were investigated. The films...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57726764679681439185 |