Applying Microwave Hydrogen Plasma Annealing to Improve Electrical and Optical Properties of Aluminum doped Zinc Oxide Films
碩士 === 崑山科技大學 === 電機工程研究所 === 99 === To investigate whether microwave hydrogen plasma annealing can improve the electric and optic properties of aluminum doped zinc oxide (AZO) films or not, AZO films were treated with microwave hydrogen plasma annealing. Different microwave power and process pressu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25642773975622748974 |