The Conveyor Prioritize Dispatching Method of Automatic Material Handling System in 450mm Semiconductor Factory
碩士 === 國立高雄應用科技大學 === 工業工程與管理系 === 99 === With economic costs scales and the technology improvement, the semiconductor manufacturing has become a global industry in recent years. According to Moore’s Law, the wafer size will increase from 300 mm to 450 mm. With the increasing size and weight, human...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13353088794622064014 |