The Optimization for Grinding Wafer Wastewater Treatment
碩士 === 國立高雄應用科技大學 === 化學工程與材料工程系 === 99 === The pollutant particle size in semiconductor has gradually become smaller with the precision of the manufacturing process. The wastewater from wafer grinding process could generate large nano-scaled polluted particles. Great amount of coagulant was always...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90941636153035506629 |