First-principles study of electric properties of ultra-thin HfO2/SiGe/Si film

碩士 === 國立高雄應用科技大學 === 電子工程系 === 99 === Strained Si1-xGex is of great interest as one of candidate channel material in complementary metal oxide semiconductor (CMOS) devices due to its high carrier mobility and the advantage of energy gap variation in band gap engineering associated with changing the...

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Bibliographic Details
Main Authors: Huang Wei Cheng, 黃暐程
Other Authors: Hung Kuan Ming
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/73274309267190368144