Investigation of Micro-structures and Photoelectric Properties on Sputtering Al-doped ZnO Thin Films with Platinum Films
碩士 === 國立高雄應用科技大學 === 光電與通訊研究所 === 99 === In this study, the multi-layers structure of transparent conductive oxide (TCO) thin films is deposited as dielectric/metal/dielectric. The dielectric of ZnO:Al (98%:2%) is prepared by RF magnetron sputtering at room temperature. The Platinum (Pt) is prepare...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63466456918164706333 |