Monitoring and Fault Detection of Manufacturing Control System
碩士 === 龍華科技大學 === 資訊管理系碩士班 === 99 === In recent years, run-to-run control technology has been widely used in the semiconductor industry. Based on the latest information observed from a process to predict and change control variables in a regression model is the main purpose; it can make reaction val...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85393199584742646946 |