The study of the characteristics the DLC thin films by pulsed discharge CVD

碩士 === 龍華科技大學 === 工程技術研究所 === 99 === Diamond-like carbon thin films is composed of amorphous carbon films from sp2 and sp3. Diamond-like carbon thin films have outstanding properties such as high transmittance, high thermal conductivity, low friction and abrasion and chemical resistance, These prope...

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Bibliographic Details
Main Authors: Cheng-Yen Shin, 辛承諺
Other Authors: T.L.Sung
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/00057562236032780030