Measuring step height by using Linnik type low coherent light interference
碩士 === 明道大學 === 光電暨能源工程學系碩士班 === 99 === The purpose of the work was to set up a microscopy interferometer and measuring step height by using low coherence light interferometry . A Super Luminescent Diode, SLD was used as the light source , and the center wavelength of SLD is 844.8 nm and coherence l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13390596906328173032 |