Effect of process parameters on microstructure and magnetic properties of single-layered FePt alloy films
碩士 === 明志科技大學 === 材料工程研究所 === 99 === The single-layered FePt films with thickness of 30 nm were deposited directly on Si(100) substrate without underlayer by in situ annealing at substrate temperature of 620 °C,the effect of process parameters on microstructure and magnetic properties of single-l...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62621609589374239716 |