The structures and photocatalytic properties of TiO2, TiO2-Ag,TiON, and TiON-Ag thin films
碩士 === 明志科技大學 === 材料工程研究所 === 99 === TiO2, TiOxNy thin films have been deposited on unheated glass substrates by a direct current (dc) reactive magnetron sputtering. TiO2-Ag, TiOxNy –Ag thin films were prepared using reactive co-sputtering with Ti and Ag targets on silicon substrates and Corning gla...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/40002946149354328229 |