Improvement for Treatment of Low Concentration Hydrofluoric Wastewater-Semiconductor Company as an Example
碩士 === 國立中興大學 === 環境工程學系所 === 99 === The process of semiconducting wafer is very complex so those products need to consume a lot of chemicals and process gas. Effluent waste water of the process and pollutant chemical are very complicated and plenty. According to categorization of waster component，...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cebyws |