Study of fluorine doped zinc oxide thin films prepared by RF magnetron sputtering for thin film solar cell applications
碩士 === 國立中興大學 === 光電工程研究所 === 99 === Fluorine-doped zinc oxide (FZO) thin films were deposited on Corning 1737 glasses by RF magnetron sputtering. This study investigated effects of deposition parameters on properties of FZO thin films by changing sputtering power, substrate temperature and hydroge...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51304459785914571880 |