Study of the mechanical lithography by Atomic Force Microscopy
碩士 === 國立中興大學 === 材料科學與工程學系所 === 99 === In the development of nanotechnology and semiconductor process, the improvement of lithography techniques is crucially important and indispensable. When the optical lithography encountered the difficulty of the resolution which reached physical limitations, ma...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68677852966523440759 |