Effects of different process parameters on the properties of carbon films prepared by thermal chemical vapor deposition using ethylene and nitrogen
碩士 === 國立中興大學 === 材料科學與工程學系所 === 99 === This study investigates the effects of different ethylene/nitrogen ratio, deposition temperature, working pressure, and mass flow rate on the properties of carbon films prepared by thermal chemical vapor deposition. In addition, this study also considers the i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93977228247375375884 |