Preparation, Characteristic and Application of TiVCr-based Multi-element Thin Films

博士 === 國立中興大學 === 材料科學與工程學系所 === 99 === The aim of this study is to prepare the TiVCr and TiVCrZrY multi-element coatings onto Si substrates in Ar and/or N2 atmosphere by magnetron sputtering using a single equimolar TiVCr and TiVCrZrY alloy target, respectively. The deposition parameters were varie...

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Bibliographic Details
Main Authors: Du-Cheng Tsai, 蔡篤承
Other Authors: 薛富盛
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/21284737836370091238