Preparation, Characteristic and Application of TiVCr-based Multi-element Thin Films
博士 === 國立中興大學 === 材料科學與工程學系所 === 99 === The aim of this study is to prepare the TiVCr and TiVCrZrY multi-element coatings onto Si substrates in Ar and/or N2 atmosphere by magnetron sputtering using a single equimolar TiVCr and TiVCrZrY alloy target, respectively. The deposition parameters were varie...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21284737836370091238 |