Microstructure and optoelectronic properties of copper indium oxide thin films deposited by reactive magnetron sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 99 === This study provides a simple method in fabrication of oxide transparent p-n junction. Cu-In and Cu-In-O films were deposited on quartz substrate by magnetron reactive co-sputtering. To examine the structure, optical and electrical properties of the Cu-In and C...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/dwr268 |