Growth and Mechanical Properties of Diamond-Like Carbon Films on Superhard Tungsten Carbides prepared by Plasma-Enhanced Chemical Vapor Deposition
碩士 === 中興大學 === 材料科學與工程學系所 === 99 === Abstract In this study, Diamond-like carbon films prepared by plasma enhanced chemical vapor deposition(PECVD) on superhard tungsten carbides and we divided it into two parts to optimize DLC films of mechanical and tribological properties. First, we used L9 Tagu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30595306947132141770 |