Silicon Nanowire pH Sensors

碩士 === 國立中興大學 === 機械工程學系所 === 99 === This study presents the fabrication of silicon nanowire pH sensors with highly- and instantly-sensitive and repeatedly-used properties. The silicon nanowire pH sensors are composed of two main parts: (1) the silicon nanowires covered by a thin oxide layer using s...

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Bibliographic Details
Main Authors: Yi-Hung Chen, 陳沂宏
Other Authors: 戴慶良
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/46659145777838772141