Polyaniline doping PVA Micro Humidity Sensors
碩士 === 國立中興大學 === 機械工程學系所 === 99 === This paper presents the fabrication of a micro humidity sensor integrated with a sensing circuit using complementary metal oxide semiconductor (CMOS) process. The humidity sensor is composed of a sensing film and an interdigitated electrode, and the sensing fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qkt7a6 |