CMOS-MEMS Micromechanical Bandpass Filters
碩士 === 國立中興大學 === 機械工程學系所 === 99 === This study develops a micromechanical bandpass filter using the standard CMOS (complementary metal oxide semiconductor) process and a wet etching with maskless post-process. This micromechanical filter is multi-order resonance system that includes a structure par...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14544992176769009136 |