A Study for Effect of Strain on Semiconductor Materials and Devices
碩士 === 國立中興大學 === 電機工程學系所 === 99 === This paper was divided into three parts. With the simulation tool from Synopsys TCAD-Sentaurus Sband, part one studied impact of strain on electron mobility of NMOS with surface orientation of (001) and channel direction of [110]. With ANSYS simulation tool, part...
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2011
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ndltd-TW-099NCHU54410462017-10-29T04:34:09Z http://ndltd.ncl.edu.tw/handle/22018026714370233954 A Study for Effect of Strain on Semiconductor Materials and Devices 半導體材料與元件的應變效應研究 Chia-Feng Li 李佳峰 碩士 國立中興大學 電機工程學系所 99 This paper was divided into three parts. With the simulation tool from Synopsys TCAD-Sentaurus Sband, part one studied impact of strain on electron mobility of NMOS with surface orientation of (001) and channel direction of [110]. With ANSYS simulation tool, part two analyzed stress distribution of three type of TFT structure devices, namely bottom gate, double gate and top gate, considering the effects of mechanical bending, gate length Young’s modulus and intrinsic stress in materials. Part three investigated strain impact of geometry structure on electron mobility, InGaAs NMOS using stress simulation tool ANSYS and Kubo-Greenwood mobility formula. 張書通 2011 學位論文 ; thesis 65 zh-TW |
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NDLTD |
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zh-TW |
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碩士 === 國立中興大學 === 電機工程學系所 === 99 === This paper was divided into three parts. With the simulation tool from Synopsys TCAD-Sentaurus Sband, part one studied impact of strain on electron mobility of NMOS with surface orientation of (001) and channel direction of [110]. With ANSYS simulation tool, part two analyzed stress distribution of three type of TFT structure devices, namely bottom gate, double gate and top gate, considering the effects of mechanical bending, gate length Young’s modulus and intrinsic stress in materials. Part three investigated strain impact of geometry structure on electron mobility, InGaAs NMOS using stress simulation tool ANSYS and Kubo-Greenwood mobility formula.
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| author2 |
張書通 |
| author_facet |
張書通 Chia-Feng Li 李佳峰 |
| author |
Chia-Feng Li 李佳峰 |
| spellingShingle |
Chia-Feng Li 李佳峰 A Study for Effect of Strain on Semiconductor Materials and Devices |
| author_sort |
Chia-Feng Li |
| title |
A Study for Effect of Strain on Semiconductor Materials and Devices |
| title_short |
A Study for Effect of Strain on Semiconductor Materials and Devices |
| title_full |
A Study for Effect of Strain on Semiconductor Materials and Devices |
| title_fullStr |
A Study for Effect of Strain on Semiconductor Materials and Devices |
| title_full_unstemmed |
A Study for Effect of Strain on Semiconductor Materials and Devices |
| title_sort |
study for effect of strain on semiconductor materials and devices |
| publishDate |
2011 |
| url |
http://ndltd.ncl.edu.tw/handle/22018026714370233954 |
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