Fabrication of hydrogenated microcrystalline silicon thin-film solar cells by high pressure depletion method
碩士 === 國立中興大學 === 電機工程學系所 === 99 === In this thesis, 40.68 MHz very-high-frequency plasma-enhanced chemical vapor deposition is used to fabricate μc-Si:H thin-film solar cells with changing the i-layer power density, deposition pressure and doping gas flow ratio of p-layer. The structural and electr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99727052320772555869 |