The growth of high quality nitride-based material on silicon substrate

博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 99 === Recent years, the silicon substrate got more and more attention in the compound semiconductor field. Because of the silicon substrate has many advantages, like lower cost, larger scale, and higher thermal conductivities. Therefore, we try to grow the high qu...

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Bibliographic Details
Main Authors: Chieh-ChihHuang, 黃皆智
Other Authors: Shoou-Jinn Chang
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/63856686585284314874